| DISILANE Basic information |
| Product Name: | DISILANE |
| Synonyms: | DISILANE;DISILANE, 99.998%, ELECTRONIC GRADE;disilicoethane;Si2H6;Silicoethane;DISILANE, 99.9+%;B silane |
| CAS: | 1590-87-0 |
| MF: | H6Si2 |
| MW: | 62.22 |
| EINECS: | 216-466-5 |
| Product Categories: | Chemical Synthesis;CVD and ALD Precursors by Metal;Materials Science;Micro/NanoElectronics;Specialty Gases;Synthetic Reagents;Chemical Synthesis;Compressed and Liquefied GasesVapor Deposition Precursors;Gases;Precursors by Metal;Synthetic Reagents;Vapor Deposition Precursors |
| Mol File: | 1590-87-0.mol |
| DISILANE Chemical Properties |
| Melting point | -132°C |
| Boiling point | -14,5°C |
| density | 0,686 g/cm3 |
| Fp | <10°C |
| form | colorless gas |
| Specific Gravity | 0.686 |
| Water Solubility | soluble CS2, ethanol, benzene [MER06] |
| Hydrolytic Sensitivity | 10: reacts extremely rapidly with moisture and oxygen - may be pyrophoric - sealed system required |
| Merck | 13,3391 |
| Stability: | Pyrophoric. Reacts violently with oxidizers and halogens. May form explosive mixtures with air. |
| InChIKey | PZPGRFITIJYNEJ-UHFFFAOYSA-N |
| CAS DataBase Reference | 1590-87-0 |
| EPA Substance Registry System | Disilane (1590-87-0) |
| Safety Information |
| Hazard Codes | F,Xn |
| Risk Statements | 17-20/21-36/37/38-42 |
| Safety Statements | 16-24-26-36/37/39 |
| RIDADR | 2203 |
| WGK Germany | 3 |
| TSCA | No |
| HazardClass | 2.1 |
| MSDS Information |
| DISILANE Usage And Synthesis |
| Chemical Properties | colourless gas with a foul odour |
| Uses | Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.1 |
| DISILANE Preparation Products And Raw materials |
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