Other grades of this product :
| TETRAKIS(DIMETHYLAMINO)TITANIUM Basic information |
| Product Name: | TETRAKIS(DIMETHYLAMINO)TITANIUM | | Synonyms: | Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(dimethylamino)titanium, (trace metal basis), 99.99%;Tetrakis(dimethylamino)titanium(IV), 99% TDMAT;Tetrakis(diMethylaMino)titaniuM, 99.99%, (trace Metal basis);Tetrakis(diMethylaMino)titaniuM, 99.99% 25GR;Tetrakis(DiMethylaMino)TitaniuM (Metals Basis);Tetrakis(diMethylaMino)titaniuM, 99.99% Metals basis;Tetrakis(diMethylaMido)titaniuM(IV) 99.999% trace Metals basis | | CAS: | 3275-24-9 | | MF: | C2H7NTi | | MW: | 92.95 | | EINECS: | 221-904-3 | | Product Categories: | metal amide complex;ALD Precursors;Classes of Metal Compounds;Ti (Titanium) Compounds;Transition Metal Compounds | | Mol File: | 3275-24-9.mol |
| TETRAKIS(DIMETHYLAMINO)TITANIUM Chemical Properties |
| Hazard Codes | F,C,Xi | | Risk Statements | 11-14-34 | | Safety Statements | 16-26-36/37/39-43-45 | | RIDADR | UN 3398 4.3/PG 1 | | WGK Germany | 3 | | TSCA | Yes | | HazardClass | 4.3 | | PackingGroup | II | | HS Code | 29319090 |
| TETRAKIS(DIMETHYLAMINO)TITANIUM Usage And Synthesis |
| Chemical Properties | clear yellow to orange liquid | | Uses | Precursors Packaged for Depositions Systems | | Uses | Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV). | | General Description | Atomic number of base material: 22 Titanium |
| TETRAKIS(DIMETHYLAMINO)TITANIUM Preparation Products And Raw materials |
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