Product

TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE

CAS No.：169896-41-7

Other grades of this product :

TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Basic information

Product Name:	TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE
Synonyms:	(TERT-BUTYLIMINO)TRIS(DIETHYLAMINO)TANTALUM;TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE;TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANTALUM(V);TRIS(DIETHYLAMINO)(T-BUTYLIMINO)TANTALUM;TRIS(DIETHYLAMINO)-TERT-BUTYLAMIDO TANTALUM;TRIS(DIETHYLAMINO)(TERT-BUTYLIMINO)TANTALUM(V);tert-butyliminotantalum,diethylazanide;TRIS(DIETHYLAMIDO)(TERT-BUTYLIMIDO)TANT&
CAS:	169896-41-7
MF:	C16H39N4Ta
MW:	468.46
EINECS:	624-910-8
Product Categories:
Mol File:	169896-41-7.mol

TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Chemical Properties

Boiling point	90°C/0.1mm
density	1.252 g/mL at 25 °C (lit.)
Fp	115 °F
form	liquid
color	colorless to pale yellow
Specific Gravity	1.252
Water Solubility	Reacts with water.
Sensitive	Air Sensitive
Hydrolytic Sensitivity	8: reacts rapidly with moisture, water, protic solvents
CAS DataBase Reference	169896-41-7
EPA Substance Registry System	Tantalum, tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-, (T-4)- (169896-41-7)

Safety Information

Hazard Codes	C
Risk Statements	10-14/15-34
Safety Statements	26-36/37/39-43-45
RIDADR	UN 3398 4.3/PG 2
WGK Germany	3
TSCA	No
HazardClass	4.3
PackingGroup	II

MSDS Information

Provider	Language
SigmaAldrich	English
ALFA	English

TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Usage And Synthesis

Uses	Tantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.
Uses	Tantalum tris(diethylamido)-tert-butylimide is used as a precursor for tantalum nitride.
General Description	Atomic number of base material: 73 Tantalum

TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Preparation Products And Raw materials

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