TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
  • CAS No.:175923-04-3
Other grades of this product :
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Basic information
Product Name:TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Synonyms:TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM;ZIRCONIUM TETRAKIS(ETHYLMETHYLAMIDE);Tetrakis(ethyl Methyl amido) zirconium;tetrakis(ethylmethylamido)zirconium(iv);tetrakis(ethylmethylamino)zirconium(iv);Tetrakis(ethylmethylamino)zirconium(IV) 99%, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamido)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD;Tetrakis(ethylmethylamino)zirconium 99.999%
CAS:175923-04-3
MF:C12H32N4Zr
MW:323.63
EINECS:
Product Categories:ALD Precursors;metal amide complex
Mol File:175923-04-3.mol
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Chemical Properties
Boiling point 81 °C0.1 mm Hg(lit.)
density 1.049 g/mL at 25 °C(lit.)
Fp 50 °F
form liquid
Specific Gravity1.049
color light yellow
Sensitive Air & Moisture Sensitive
Hydrolytic Sensitivity8: reacts rapidly with moisture, water, protic solvents
Safety Information
Hazard Codes F,Xi
Risk Statements 11-14-36/37/38-14/15
Safety Statements 16-26-36
RIDADR UN 3398 4.3/PG 2
WGK Germany 3
TSCA No
HazardClass 4.3
PackingGroup II
MSDS Information
ProviderLanguage
SigmaAldrich English
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Usage And Synthesis
UsesPrecursors Packaged for Depositions Systems
General DescriptionAtomic number of base material: 40 Zirconium
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Preparation Products And Raw materials

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