(Trimethyl)methylcyclopentadienylplatinum(IV)

(Trimethyl)methylcyclopentadienylplatinum(IV)
  • CAS No.:94442-22-5
Other grades of this product :
(Trimethyl)methylcyclopentadienylplatinum(IV) Basic information
Uses
Product Name:(Trimethyl)methylcyclopentadienylplatinum(IV)
Synonyms:Methylcyclopentadienyl trimethyl platinum;Trimethyl(methylcyclopentadienyl)platinum(IV) packaged for use in deposition systems;(Trimethyl)methylcyclopentadienylplatinum(IV), 99%, 78-1350, contained in 50 ml Swagelok cylinder for CVD/ALD;(TriMethyl)MethylcyclopentadienylplatinuM(IV),98%;(η5-methylcyclopentadienyl)trimethylplatinum(IV);(TriMethyl)MethylcyclopentadienylplatinuM(IV), 99%, 78-1350, contained in 50 Ml Swagelokcylinder high teMperature valve (96-1071) for CVD/ALD;(TriMethyl)MethylcyclopentadienylplatinuM(IV), 99%, 78-1350, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD;MeCpPtMe3
CAS:94442-22-5
MF:C9H9Pt
MW:312.26
EINECS:
Product Categories:Pt;ALD Precursors;Platinum;Precursors by Metal;Vapor Deposition Precursors;metallocene
Mol File:94442-22-5.mol
(Trimethyl)methylcyclopentadienylplatinum(IV) Chemical Properties
Melting point 26-29 °C(lit.)
Boiling point 23°C 0,05mm
density 1.88
Fp 131 °F
storage temp. 2-8°C
form Powder
color off-white
Water Solubility insoluble
Sensitive Air Sensitive
Exposure limitsACGIH: TWA 0.002 mg/m3NIOSH: IDLH 4 mg/m3; TWA 0.002 mg/m3
CAS DataBase Reference94442-22-5(CAS DataBase Reference)
EPA Substance Registry SystemPlatinum, trimethyl[(1,2,3,4,5-.eta.)-1-methyl-2,4-cyclopentadien-1-yl]- (94442-22-5)
Safety Information
Hazard Codes Xi,N,T+
Risk Statements 36/37/38-50-43-27/28
Safety Statements 22-24/25-61-45-36/37-28
RIDADR UN3467 - class 6.1 - PG 1 - EHS - Organometallic compound, toxic, solid, n.o.s., HI: all (not BR)
WGK Germany 3
TSCA Yes
HS Code 28439000
MSDS Information
ProviderLanguage
ACROS English
SigmaAldrich English
ALFA English
(Trimethyl)methylcyclopentadienylplatinum(IV) Usage And Synthesis
UsesPlatinum complex widely used in CVD and ALD applications due, in part, to its simplicity (only C,H and Pt), volatility and moderate decomposition temperatures.
Chemical Propertieswhite to off-white crystals or crystalline powder
Uses(Trimethyl)methylcyclopentadienylplatinum(IV) was used for the deposition of ultrathin metallic layers of platinum by electron beam induced deposition, atomic sputtering.These deposits find application in microelectronics, catalysis, photonics and chemical sensing.
UsesTrimethyl(methylcyclopentadienyl)platinum(IV) is used as an organometallic precursor for platinum. It is used in the microelectronics, catalysis, photonics and chemical sensing processes. It is used for the deposition of ultrathin metallic layers of platinum by the electron beam induced deposition process.
UsesPrecursors Packaged for Depositions Systems
General DescriptionTrimethyl(methyl cyclopentadienyl)platinum(IV) ( MeCpPtMe3) is a commonly used organometallic precursor for platinum.
(Trimethyl)methylcyclopentadienylplatinum(IV) Preparation Products And Raw materials
Raw materials2-METHYLCYCLOPENTADIENE-->IODOTRIMETHYLPLATINUM (IV)

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