TETRAKIS(DIETHYLAMINO)TITANIUM

CAS No.：4419-47-0

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This product is a chemical product/pharmaceutical intermediate. It is not a drug, an active pharmaceutical ingredient (API), or a pharmaceutical-grade material. It has not been granted a drug approval number or a Chemical Drug Substance Approval Notice, has not passed drug-related review and approval, and is not manufactured, tested, or released in accordance with pharmaceutical GMP.
This product is intended solely for non-clinical research, process development, quality studies, further chemical processing, or chemical synthesis. It must not be used in drug-product manufacturing, clinical trials, clinical diagnosis, or administration to humans or animals, or be sold, used as an input, submitted for regulatory filing, or released as an API or pharmaceutical material.
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TETRAKIS(DIETHYLAMINO)TITANIUM Basic information

Description Reference

Product Name:	TETRAKIS(DIETHYLAMINO)TITANIUM
Synonyms:	TDEAT;TETRAKIS (DIETHYLAMIDO) TITANIUM;TETRAKIS(DIETHYLAMINO)TITANIUM;TETRAKIS DIETHYL AMINO TITANIUM (IV);TITANIUM (IV) DIETHYLAMIDE;TITANIUM TETRAKIS(DIETHYLAMIDE);Titanium, tetrakis(diethylamino)-;TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%
CAS:	4419-47-0
MF:	C16H40N4Ti
MW:	336.38
EINECS:
Product Categories:	metal amide complex
Mol File:	4419-47-0.mol

TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties

Melting point	4 °C
Boiling point	112 °C0.1 mm Hg(lit.)
density	0.931 g/mL at 25 °C(lit.)
refractive index	n20/D 1.536(lit.)
Fp	-18 °F
storage temp.	Store at +2°C to +8°C.
solubility	Reacts with air.
form	liquid
color	yellow to orange
Specific Gravity	0.95
Hydrolytic Sensitivity	8: reacts rapidly with moisture, water, protic solvents
Sensitive	Moisture Sensitive
BRN	3621431
CAS DataBase Reference	4419-47-0(CAS DataBase Reference)
NIST Chemistry Reference	Tetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry System	Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)

Safety Information

Hazard Codes	F,C,Xi
Risk Statements	11-14/15-34-36/37/38
Safety Statements	26-36/37/39-43-45-37/39-16
RIDADR	UN 3398 4.3/PG 1
WGK Germany	3
F	10-21
TSCA	Yes
HS Code	2921 19 50
HazardClass	4.3
PackingGroup	II

MSDS Information

Provider	Language
ACROS	English
SigmaAldrich	English
ALFA	English

TETRAKIS(DIETHYLAMINO)TITANIUM Usage And Synthesis

Description	Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method^1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
Reference	Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248. Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71. Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.
Chemical Properties	Clear dark red liquid
Uses	Precursors Packaged for Depositions Systems
General Description	Atomic number of base material: 22 Titanium
Purification Methods	Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]

TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials

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