TETRAKIS(DIETHYLAMINO)TITANIUM

CAS No.：4419-47-0

Other grades of this product :

TETRAKIS(DIETHYLAMINO)TITANIUM Basic information

Description Reference

Product Name:	TETRAKIS(DIETHYLAMINO)TITANIUM
Synonyms:	TDEAT;TETRAKIS (DIETHYLAMIDO) TITANIUM;TETRAKIS(DIETHYLAMINO)TITANIUM;TETRAKIS DIETHYL AMINO TITANIUM (IV);TITANIUM (IV) DIETHYLAMIDE;TITANIUM TETRAKIS(DIETHYLAMIDE);Titanium, tetrakis(diethylamino)-;TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%
CAS:	4419-47-0
MF:	C16H40N4Ti
MW:	336.38
EINECS:
Product Categories:	metal amide complex
Mol File:	4419-47-0.mol

TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties

Melting point	4 °C
Boiling point	112 °C0.1 mm Hg(lit.)
density	0.931 g/mL at 25 °C(lit.)
refractive index	n20/D 1.536(lit.)
Fp	-18 °F
storage temp.	Store at +2°C to +8°C.
solubility	Reacts with air.
form	liquid
color	yellow to orange
Specific Gravity	0.95
Hydrolytic Sensitivity	8: reacts rapidly with moisture, water, protic solvents
Sensitive	Moisture Sensitive
BRN	3621431
CAS DataBase Reference	4419-47-0(CAS DataBase Reference)
NIST Chemistry Reference	Tetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry System	Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)

Safety Information

Hazard Codes	F,C,Xi
Risk Statements	11-14/15-34-36/37/38
Safety Statements	26-36/37/39-43-45-37/39-16
RIDADR	UN 3398 4.3/PG 1
WGK Germany	3
F	10-21
TSCA	Yes
HS Code	2921 19 50
HazardClass	4.3
PackingGroup	II

MSDS Information

Provider	Language
ACROS	English
SigmaAldrich	English
ALFA	English

TETRAKIS(DIETHYLAMINO)TITANIUM Usage And Synthesis

Description	Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method^1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
Reference	Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248. Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71. Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.
Chemical Properties	Clear dark red liquid
Uses	Precursors Packaged for Depositions Systems
General Description	Atomic number of base material: 22 Titanium
Purification Methods	Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]

TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials

Welcome！

Please leave a message for us or use the following ways to contact us, we will reply to you as soon as possible, and provide you with the most sincere service, thank you.

NO. 18 ,Wujiang Road, Wulidian Street, Jiangbei District, Chongqing
+86-23-6139-8061 +86-13650506873
danny@chemdad.com sales@chemdad.com
www.chemdad.com
WhatsApp +86-13650506873