TETRAKIS(TRIMETHYLSILOXY)SILANE
TETRAKIS(TRIMETHYLSILOXY)SILANE
  • CAS No.:3555-47-3
Other grades of this product :

TETRAKIS(TRIMETHYLSILOXY)SILANE Basic information
Product Name:TETRAKIS(TRIMETHYLSILOXY)SILANE
Synonyms:1,1,1,5,5,5-hexamethyl-3,3-bis-(trimethylsilanyloxy)-trisiloxane;1,1,1,5,5,5-hexamethyl-3,3-bis(trimethylsiloxy)-Trisiloxane;1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-trisiloxan;1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-Trisiloxane;1,1,1,5,5,5-hexamethyl-3,3-bis-trimethylsilanyloxy-trisiloxane;1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane;Tetrakis-(trimethylsilyloxy)-silan;Trisiloxane,1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-
CAS:3555-47-3
MF:C12H36O4Si5
MW:384.84
EINECS:222-613-4
Product Categories:Organics;OthersOrganometallic  Reagents;Organometallic  Reagents;Organosilicon;Trialkoxysilanes
Mol File:3555-47-3.mol
TETRAKIS(TRIMETHYLSILOXY)SILANE Chemical Properties
Melting point -60 °C
Boiling point 103-106 °C/2 mmHg (lit.)
density 0.87 g/mL at 25 °C (lit.)
vapor pressure 27.4hPa at 20℃
refractive index n20/D1.389(lit.)
Fp 169 °F
storage temp. Inert atmosphere,Room Temperature
form liquid
Specific Gravity0.868
color Colorless to Almost colorless
Water Solubility 150.7ng/L at 23℃
Hydrolytic Sensitivity4: no reaction with water under neutral conditions
BRN 1793898
LogP9 at 25℃
EPA Substance Registry SystemTetrakis(trimethylsiloxy)silane (3555-47-3)
Safety Information
Hazard Codes Xi
Risk Statements 36/37/38
Safety Statements 26-36
WGK Germany 3
TSCA Yes
HS Code 29319090
MSDS Information
ProviderLanguage
SigmaAldrichEnglish
ACROSEnglish
ALFAEnglish
TETRAKIS(TRIMETHYLSILOXY)SILANE Usage And Synthesis
Chemical PropertiesColorless liquid
UsesTetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.
Flammability and ExplosibilityNotclassified
TETRAKIS(TRIMETHYLSILOXY)SILANE Preparation Products And Raw materials
Raw materials3-Ethoxy-1,1,1,5,5,5-hexamethyl-3-(trimethylsiloxy)trisiloxane-->HEXAKIS(TRIMETHYLSILOXY)DISILOXANE-->Tetrasiloxane, 1,1,1,7,7,7-hexamethyl-3-(1-methylethoxy)-3,5,5-tris[(trimethylsilyl)oxy]--->3-Isopropoxy-1,1,1,5,5,5-hexamethyl-3-(trimethylsiloxy)trisiloxane-->bis(trimethylsilyl) diethyl silicate-->trimethylsiloxytriethoxysilane-->TETRABENZYLOXYSILANE-->(2-METHYL-PROPENYL)TRIMETHYLSILANE-->hydroxytrimethylsilane-->Ethoxytrimethylsilane-->Ethanol-->METHOXYTRIMETHYLSILANE
Preparation Productstris(Trimethylsilyloxy)silanol

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